COMPUTER SIMULATION OF THIN FILM DEPOSITION PROCESS BY SPUTTERING
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Magnetics Society of Japan
سال: 1993
ISSN: 1880-4004,0285-0192
DOI: 10.3379/jmsjmag.17.s2_170